Abstract：In this study, gas temperature measurements of argon, nitrogen, and air microwave plasmas are achieved by the molecular emission spectrometry of the A2Σ+→X2Πr electronic system of OH radical. The gas temperatures at different microwave powers or gas flow rates were explored, and the axial temperature distributions of nitrogen and air microwave plasma plumes were measured. The experimental results showed that temperatures in the core region of microwave plasma were higher than 2000 K at different working conditions, even up to over 6 000 K in air microwave plasma. At the same working condition, the three kinds of microwave plasma gas temperatures meet: TAr<TN2<TAir. The gas temperature increased slightly with the increase of microwave power, and decreased slightly with the decrease of gas flow rate overall. The gas temperatures of nitrogen and air microwave plasma plumes reduced quickly along the axial direction. In order to verify the accuracy of molecular emission spectrometry, the thermocouple was used as a comparison to take the temperature of the dielectric barrier discharge argon plasma. Experiments showed that the temperature measurements of molecular emission spectrometry and thermocouple are fairly consistent.
Key words：Molecular emission spectrometry; Microwave plasma; OH radical; Gas temperature
基金资助: Chinese National Natural Science Foundation (51177085)
通讯作者:
张贵新
E-mail: guixin@mails.tsinghua.edu.cn
作者简介: DENG Lei, (1994—), graduate student in Tsinghua University e-mail:
deng116@mails.tsinghua.edu.cn
引用本文:
邓 磊，张贵新，刘 程，谢 宏. 分子发射光谱法测量微波等离子体气体温度[J]. 光谱学与光谱分析, 2018, 38(02): 627-633.
DENG Lei, ZHANG Gui-xin, LIU Cheng, XIE Hong. Measurement of the Gas Temperature in Microwave Plasma by Molecular Emission Spectrometry. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2018, 38(02): 627-633.
[1] Uhm H S, Hong Y C, Shin D H. Plasma Sources Science Technology, 2006, 15: S26.
[2] Choi D H, Chun S M, Ma S H, et al. Journal of Industrial and Engineering Chemistry, 2016, 34: 286.
[3] XIE Hong-duan, SUN Bing, ZHU Xiao-mei. Journal of Hazardous Materials, 2009, 168: 765-769.
[4] Tendero C, Tixier C, Tristant P, et al. Spectrochimica Acta Part B, 2006, 61: 2.
[5] Green K M, Borras M C, Woskov P P, et al. IEEE Transactions on Plasma Science, 2001, 29(2): 399.
[6] PENG Zhi-min, DING Yan-jun, YANG Qian-suo, et al. Acta Physica Sinica, 2011, 60(5): 053302.
[7] Hong Y C, Chun S M, Cho C H, et al. IEEE Transactions on Plasma Science, 2015, 43(2): 696.
[8] Su Liu, Kumar R, Ogungbesan B, et al. Energy Conversion and Management, 2014, 78: 695.
[9] Li D, Nikiforov A, Britun N, et al. Journal of Physics D: Applied Physics, 2016, 49: 455202.
[10] Dieke G H, Crosswhite H M. Journal of Quantitative Spectroscopy & Radiative Transfer, 1962, 2(2): 97.
[11] Luque J, Crosley D R. Journal of Chemical Physics, 1998, 109(2): 439.
[12] ZHAI Xiao-dong, DING Yan-jun, PENG Zhi-min, et al. Journal of Tsinghua University·Science and Technology, 2012, 52(7): 980.
[13] Bruggeman P J, Sadeghi N, Schram D C, et al. Plasma Sources Science and Technology, 2014, 23: 023001.
[14] Luque J, Crosley D R. SRI International Report MP 99-009 (1999).
[15] Kim J H, Hong Y C, Kim H S, et al. Journal of the Korean Physical Society, 2003, 42: S876.
[16] NIST Atomic Spectral Database Lines Data (ASD). http://physics.nist.gov/PhysRefData/ASD/lines_form.html.
