Spectroscopic Method for Diagnosing PS-PVD Jet of Different Gas Composition
WANG Kai1，LIU Min2，MAO Jie2，DENG Zi-qian2，WEN Kui1
1. School of Materials Science and Engineering, Central South University, Changsha 410000, China
2. Guangdong Institute of New Materials, National Engineering Laboratory for Modern Material Surface Engineering Technology, The Key Lab of Guangdong for Modern Surface Engineering Technology，Guangzhou 510651, China
Abstract：Emission spectroscopy was used to analyze the plasma spray physical vapor deposition (PS-PVD) jet of different gas compositions and Abel inversion was used to calculate the spectral intensity of radial point to get the gas distributions of different gases. Multispectral line slope method was used to study the impact of radial distance and gas composition on electronic temperature. Radial distribution of electronic density was calculated by stark broadening. The results showed that: in Ar/H2 gas, H2 was well-distributed in the 0-30mm area and increased with radial distance in the 30~60 mm area; After adding He gas, the concentrations of Ar and H2 were low at the centre of jet and increased with radial distance, and He gathered at the centre of plasma jet; Electronic temperature and density decreased with the increase of radial distance, at the same time, influenced by H2 and He.
Key words：Low pressure plasma Jet; Emission spectrum; Gas composition; Electronic temperature; Electronic density
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