Study on Strain Detection with Si Based on Bicyclic Cascade Optical Microring Resonator
TANG Jun1,2, LEI Long-hai1,2, ZHANG Wei1,2, ZHANG Tian-en1,2, XUE Chen-yang1,2, ZHANG Wen-dong1,2, LIU Jun1,2*
1. Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China 2. Key Laboratory of Science and Technology for Electronic Test & Measurement, North University of China, Taiyuan 030051, China
Abstract：Optical micro-ring resonator prepared on Silicon-On-Insulator (SOI) has high sensitivity, small size and low mode volume. Its high sensitivity has been widely applied to the optical information transmission and inertial navigation devices field, while it is rarely applied in the testing of Mechanics. This paper presents a cantilever stress/strain gauge with an optical micro-ring resonator. It is proposed the using of radius change of ring waveguide for the sensing element. When external stress is put on the structure, the radius of the SOI ring waveguide will be subjected to variation, which causes the optical resonant parameters to change. This ultimately leads to a red-shift of resonant spectrum, and shows the excellent characteristics of the structure’s stress/strain sensitivity. Designed a bicyclic cascade embedded optical micro-cavity structure, which was prepared by employing MEMS lithography and ICP etching process. The characteristic of stress/strain sensitivity was calculated theoretically. Two values of 0.185 pm·kPa-1 and 18.04 pm·microstrain-1 were obtained experimentally, which also was verified by theoretical simulations. Comparing with the single-loop micro-cavity structure, its measuring range and stress sensitivity increased by nearly 50.3%, 10.6%, respectively. This paper provides a new method to develop micro-opto-electromechanical system (MOEMS) sensors.
唐 军1,2，雷龙海1,2，张 伟1,2，张天恩1,2，薛晨阳1,2，张文栋1,2，刘 俊1,2* . Si基双环级联光学谐振腔应变检测研究 [J]. 光谱学与光谱分析, 2016, 36(03): 874-879.
TANG Jun1,2, LEI Long-hai1,2, ZHANG Wei1,2, ZHANG Tian-en1,2, XUE Chen-yang1,2, ZHANG Wen-dong1,2, LIU Jun1,2*. Study on Strain Detection with Si Based on Bicyclic Cascade Optical Microring Resonator. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(03): 874-879.
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