The Study of PDMS Grating Structure Gradient Preparation Techniques
WANG Chen-guang1,2, YANG Jiang-tao1,2, KANG Ning1,2, GUO Hao1,2, TANG Jun1,2, LIU Jun1,2*, XUE Chen-yang1,2
1. Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China 2. Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, China
Abstract：Because traditional method for tunable grating fabrication has harsh process condition，complex fabrication process,high costs and long cycle. Proposed a low-cost, simple process, can be prepared in large quantities gradient grating process method, based on self-assembly process using the rigid film/flexible substrate and oxygen plasma method prepared a micron scale gradient grating. Use of plasma free time controllability and excellent elastic of PDMS obtained the desired grating. First, polyethylene terephthalate (PET) was spin-coated layer of polydimethylsiloxane (PDMS) film on the thin film, two-layer film to be cured PDMS film after bending and treated with an oxygen plasma (plasma), in generating a rigid surface oxide layer,With flexible PET rigid layer applied uniform stress, when the stress exceeds the critical value, the PDMS substrate to form a self-assembled structure grating fold. Due to changes in prestressed bending, so the PDMS film formation period and height of the grating stepped fold, which is graded grating. Using visible light as the performance test light source for graded grating and selecting first-order diffracted as the detection target. The authors can see the grating has a good diffraction effects and achieves good spectral effect. Experiments show that graded grating has obvious diffraction grating, and the diffraction angle varies significantly, and can be widely used for stress measurement, the flexible gradient grating prepared by this method can also be used to detect changes in the stress strain as a miniature device, the future is expected for miniature spectrometer, scanners, optical communications and other fields.
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