A Surface Plasmon Micro-Ring Sensor Suitable for Humidity Sensing
LI Zhi-quan1, AN Dong-yang1, ZHANG Xin1, ZHAO Ling-ling1, SHA Xiao-peng1, GUO Shi-liang1, LI Wen-chao2
1. College of Electrical Engineering, Yanshan University, Qinghuangdao 066004, China 2. School of Control Engineering, Northeastern University at Qinhuangdao, Qinhuangdao 066004, China
Abstract：Temperature is a very important parameter in scientific research, production and life. Almost all the properties of materials are related to temperature. The precise measurement of the temperature is a very important task, so the temperature sensor is widely used as a core part in the temperature measuring instrument. A novel surface plasmon micro-ring sensor suitable for humidity sensing is presented in this paper. The sensor uses a multi-layered surface plasmon waveguide structure and choosing Polyimide (Polyimide, PI) as the moisture material. We get the transfer function of surface plasmon micro-ring sensor by using transfer matrix method. Refractive indexes of Polyimide and the multilayer waveguide structure change as environment relative humidity changes, thus leading to an obvious peak drift of output spectrum. The paper mainly discusses the influence of the changes of the refractive index of humidity-sensing parts on the output spectrum, and the transmission characteristics of multilayer waveguide structure. Through the finite element method and the theoretical simulation of Matlab，We can draw：When the length between the two coupling points of the U-shaped waveguide is an integer multiple of circumference of the micro-ring, an obvious drift in the horizontal direction appears, the free spectral range (FSR) doubled and the sensitivity is 0.000 5 μm/%RH; When the external environment relative humidity RH changes from 10% to 100% RH, scatter is change between including (including 0.005 m to 0.005 m, compared to other humidity sensor, the Sensitivity of sensor improves 10～50 times and the transmission is very stable. Results show that the design of surface plasma micro ring sensors has better sensitivity, stable performance and can be used in the humidity measurement, achieving a high sensitivity in the sense of humidity when the wide range of filter frequency selection is taken into account, and providing a theoretical basis for the preparation of micro-optics.
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