Design and Implementation of a Long Wavelength Near InfraRed Spectrometer Based on MEMS Scanning Mirror
YE Kun-tao1, DONG Tai-yuan1, HE Wen-xi1, LI Yu-xiao1, CHENG Xian-ming1, LI Guang-yong1, LI Hao-yu2, XU Xiao-xuan2*
1. College of Science, Jiangxi University of Science and Technology, Ganzhou 341000, China 2. College of Physics, Nankai University, Tianjin 300071, China
Abstract：Long Wavelength Near InfraRed(LW-NIR) spectrometer has wide applications. Miniaturization and low-cost are two major goals of the development of LW-NIR spectrometer in the industrial or research community. Under the background that having a trend of spectrometer miniaturization and integration, method and main problems involved in miniaturization of LW-NIR spectrometer through MEMS scanning mirror, such as the design strategy of the light-splitting optical system, selection considerations of the MEMS scanning mirror, design method of the preamplifier circuit, etc, have been presented in detail. A prototype of miniaturized LW-NIR spectrometer, with the spectrum range of detection of 900～2 055 nm, is designed and implemented using MEMS scanning mirror, InGaAs single detector unit with high sensitivity. Littrow optical layout is used for its light-splitting optical system, and the spectral resolution is between 9.4～16 nm at 1 000～1 965 nm detection wavelength range. The prototype is successfully applied in LW-NIR spectrum measurement on pure water and ethanol aqueous solution, and a forecast analysis on ethanol aqueous solution concentration is also demonstrated. Through adopting MEMS scanning mirror into the spectrometer system, the complexity of the mechanical scanning fixtures and its controlling mechanism is greatly reduced therefore the size of the spectrometer is reduced. Furthermore, due to MEMS scanning mirror technology, LW-NIR spectrometer with single InGaAs detector is achieved, thus the cost reduction of the NIR spectrometer system is also realized because the expensive InGaAs arrays are avoided.
叶坤涛1，董太源1，贺文熙1，李玉晓1，程显明1，李广勇1，李昊宇2，徐晓轩2* . 基于MEMS微镜的长波近红外光谱仪的设计与实现 [J]. 光谱学与光谱分析, 2014, 34(10): 2858-2862.
YE Kun-tao1, DONG Tai-yuan1, HE Wen-xi1, LI Yu-xiao1, CHENG Xian-ming1, LI Guang-yong1, LI Hao-yu2, XU Xiao-xuan2*. Design and Implementation of a Long Wavelength Near InfraRed Spectrometer Based on MEMS Scanning Mirror. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2014, 34(10): 2858-2862.
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