A Microfabricated ICP Source Base on Planar Spiral-Shaped Coil
WANG Yong-qing1,2,LOU Jian-zhong1,SUN Rong-xia1,MA Wen3,TANG Yu-jun1,PU Yong-ni1
1. College of Electronic & Informational Engineering, Hebei University, Baoding 071002, China 2. Central Iron & Steel Research Institute, National Testing Center of Iron & Steel, Beijing 100081, China 3. The Chinese People’s Armed Police Forces Academy, Langfang 065000, China
Abstract：Along with the development of micro-electromechanical system technology, the reports on the optical splitting systems and the photoelectric detection systems of spectrometer based on micro-electromechanical system have become increasingly popular, whereas the reports on micro excitation source in the development of micro spectrometer are few. In other words, the development of micro excitation source is the most important part in the development of the micro spectrometer. A novel low-pressure microfabricated inductively coupled plasma source is introduced, which is an emission spectrum excitation source based on surface-micromaching technology. Its radio frequency power consumption is much lower than the general inductively coupled plasma source. The source can work at an argon gas pressure of 100 Pa, and thus consumes less argon. The principle of operation for a microfabricated inductively coupled plasma source is illustrated. The layout of the planar spiral-shaped coil, the matched capacitor and the resonant capacitor is given. The fabrication process and properties of the plasma source are described. Meanwhile a novel inductively coupled plasma based on the technology of printed circuit board is introduced. In the experiment, the planar spiral-shaped coil and interdigatial capacitor were used. When the pressure of argon was 100 Pa and the radio frequency power was 3.5 W at 13.56 MHz the novel inductively coupled plasma was ignited. The photo of the argon ignition is given. Finally the potential application of the micro inductively coupled plasma in spectrometers is presented.
[1] ZHENG Guo-jing(郑国经). Modern Scientific Instruments(现代科学仪器), 2000, (2): 3. [2] WANG Yong-qing, MA Wen, et al(王永清,马 雯, 等). Metallurgical Analysis(冶金分析), 2006, 26(4): 40. [3] Zavracky P M, DenisK L, Xie H K, et al. Proceedings of SPIE, 1998, 3514: 179. [4] Zavracky P M. A Fabry-Perot Spectrometer Microspectrometer Fabricated Using Surface Micromachining Technology[EB/OL]. http://www.ece.neu.edu/edsnu/zavracky/mfl/programs/spec/microspe.html, 2005-03-15. [5] WEN Zhi-yu, CHEN Gang, WANG Jian-guo(温志渝, 陈 刚, 王建国). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 2006, 26(10): 1955. [6] JU Hui, WU Yi-hui(鞠 挥, 吴一辉). Optics and Precision Engineering(光学精密工程), 2001, 9(4): 372. [7] JU Hui, WU Yi-hui(鞠 挥, 吴一辉). Micronanoelectronic Technology(微纳电子技术), 2003, 40(1): 30. [8] SHI Jun-feng, HUI Mei, WANG Dong-sheng, et al(史俊锋, 惠 梅, 王东生, 等). Optical Technique(光学技术), 2003, 29(1): 13. [9] Yin Y, Messier J, Hopwood J. IEEE Trans. Plasma Sci., 1999, 27(5): 1516. [10] Hopwood J. Journal of Microelectromechanical Systems, 2000, 9(3): 309. [11] Hopwood J, Minayeva O, Yin Y. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000, 18(5): 2446. [12] Hopwood J. United States Patent: 5942855, 1999-8-24. [13] Minayeva O B, Hopwood J. Journal of Applied Physics, 2003, 94(5): 2821. [14] Minayeva O B, Hopwood J A. J. Anal. At. Spectrom., 2002, 17(9): 1103. [15] Hopwood J. Microplasma Research[EB/OL]. http://www.ece.neu.edu/edsnu/hopwood/microICP_old.html, 2006-09-15. [16] Hopwood J. Microplasma Research [EB/OL]. http://www.ece.neu.edu/edsnu/hopwood/microicp.html, 2007-03-15. [17] CHEN Jin-zhong, HA Jing, WEI Yan-hong, et al(陈金忠, 哈 静, 魏艳红, 等). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 2006, 26(9): 1707. [18] Minayeva O B, Hopwood J A. J. Anal. At. Spectrom., 2003, 18(8): 856. [19] Hopwood J A, McGruer N. A Microfabricated Gas Analysis System[EB/OL]. http://www.ece.neu.edu/edsnu/hopwood/tampa-proceedings.pdf, 2005-04-17. [20] Hopwood J A, McGruer N. Proposal # 1: Development of a MEMS Based Micro Gas Analysis System[EB/OL]. http://www.cmc.neu.edu/pdf/Proposals/micro_gas_analysis_system.pdf, 2007-03-15. [21] Hopwood J A. Microplasma: Physics and Applicitions[EB/OL]. http://www7.nationalacademies.org/bpa/PLSC_MtgFall2003_Hopwood.pdf, 2007-03-15. [22] McGruer N, Hopwood J, Minayeva O, et al. A Microfabricated Micro Gas Analysis System[EB/OL]. http://www.coe.neu.edu/research/cmc/pdf/Presentations/IUCRC_MicroGas%20Ananlyzer.prn.pdf, 2005-04-17.
