Application of Confocal Technology Based on Polycapillary X-Ray Lens in Measuring Thickness
PENG Song1, 2, 3, LIU Zhi-guo1, 2, 3, SUN Tian-xi1, 2, 3*, LI Yu-de1, 2, 3, LIU He-he1, 2, 3, ZHAO Wei-gang1, 2, 3, ZHAO Guang-cui1, 2, 3, LIN Xiao-yan1, 2, 3, LUO Ping1, 2, 3, PAN Qiu-li1, 2, 3, DING Xun-liang1, 2, 3
1. The Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University, Beijing 100875, China 2. College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China 3. Beijing Radiation Center, Beijing 100875, China
Abstract：A confocal micro X-ray fluorescence thickness gauge based on a polycapillary focusing X-ray lens, a polycapillary parallel X-ray lens and a laboratory X-ray source was designed in order to analyze nondestructively the thickness of thin film and cladding material. The performances of this confocal thickness gauge were studied. Two Ni films with a thickness of about 25 and 15 μm respectively were measured. The relative errors corresponding to them were 3.5% and 7.1%, respectively. The thickness uniformity of a Ni films with a thickness of about 10 μm was analyzed. This confocal technology for measuring the thickness was both spatially resolved and elemental sensitive, and therefore, it could be used to measure the thickness of the multilayer sample and analyze the thickness uniformity of the sample. This confocal thickness gauge had potential applications in analyzing the thickness of sample.
Key words：X-ray optics;Confocal technology for measuring thickness;Polycapillary X-ray lens;X-ray fluorescence
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