Abstract：ZnMgO films were deposited on quartz glass substrates by the ultrasonic spray pyrolysis at different substrate temperatures(450～550 ℃). The structural, surface morphological and optical properties of the samples were investigated by X-ray diffraction (XRD), scanning electron microscope (SEM) and photoluminescence (PL) spectroscopy. The results demonstrate that the substrate temperature has important effect on structural and optical characteristics. All the films have hexagonal wurtzite polycrystalline structures and the c-axis preferential orientation has an optimum temperature of 530 ℃. The sample prepared at this temperature owns uniform grain size, smooth surface morphology and better crystalline quality. The width of deep-level emission decreases and the near band edge (NBE) ultraviolet emission peak appears with the increase in temperature by the PL spectrum. When the temperature arrives to 530℃, a distinct NBE emission peak can be observed at 374.5 nm, while the deep-level emission is almost undetectable.
董李娜，王玉新*，孙景昌，郑亚茹，张 焕，梁 鸣，林茂魁，崔 硕 . 衬底温度对ZnMgO薄膜结构和光致发光性能的影响 [J]. 光谱学与光谱分析, 2013, 33(08): 2051-2054.
DONG Li-na, WANG Yu-xin*, SUN Jing-chang, ZHENG Ya-ru, ZHANG Huan, LIANG Ming, LIN Mao-kui, CUI Shuo . Effect of Substrate Temperature on Structure and Photoluminescence of ZnMgO Films . SPECTROSCOPY AND SPECTRAL ANALYSIS, 2013, 33(08): 2051-2054.
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