Optical Emission Analyses of N2/TMG ECR Plasma for Deposition of GaN Film
FU Si-lie1, WANG Chun-an2, CHEN Jun-fang1
1. School of Physics and Communication Engineering, Laboratory of Quantum Information Technology, South China Normal University, Guangzhou 510006, China 2. School of Electronic and Information, Guangdong Polytechnic Normal University, Guangzhou 510665, China
Abstract：The optical emission spectroscopy of hybrid N2/trimethylgallium (TMG) plasma in an ECR-PECVD system was investigated. The results indicate that the TMG gas is strongly dissociated into Ga*, CH and H even under self-heating condition. Ga species and nitrogen molecule in metastable state are dominant in hybrid ECR plasma. The concentration of metastable nitrogen molecule increases with the microwave power. On the other hand, the concentration of excited nitrogen molecules and of nitrogen ion decreases when the microwave power is higher than 400 W.
符斯列1, 王春安2, 陈俊芳1 . 等离子体化学气相沉积氮化镓薄膜中的N2/TMG等离子体发射光谱分析 [J]. 光谱学与光谱分析, 2013, 33(04): 1108-1111.
FU Si-lie1, WANG Chun-an2, CHEN Jun-fang1 . Optical Emission Analyses of N2/TMG ECR Plasma for Deposition of GaN Film . SPECTROSCOPY AND SPECTRAL ANALYSIS, 2013, 33(04): 1108-1111.
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