激光诱导击穿光谱在材料表面分析领域中的应用进展

doi:10.3964/j.issn.1000-0593(2012)06-1441-06

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摘要：激光诱导击穿光谱作为表面分析工具是近十年发展起来的，对表面分析基础理论、仪器装置及其在材料科学领域中的应用进行详细的综述。重点阐述了激光诱导击穿光谱在国内外冶金、半导体、电子等材料科学领域中的元素分布分析及镀层分析应用进展，指出激光束单个脉冲能量、环境气体及气压、激光束能量分布等参数对分辨率的影响，同时指出在兼顾灵敏度的前提下提高分辨率的途径。与传统经典表面分析工具相比较具有扫描面积大、分析速度快及样品导电与否均可分析等优点，成为传统表面分析工具的有力补充。

关键词：激光诱导击穿光谱;材料科学;表面分析;应用进展

Abstract：As a truly surface analytical tool, laser-induced breakdown spectroscopy (LIBS) was developed in recent ten years, and in this paper, fundamental theory, instrumentation and it’s applications in material science are reviewed in detail. Application progress of elemental distribution and depth profile analysis are mainly discussed in the field of metallurgy, semiconductor and electronical materials at home and abroad. It is pointed out that the pulse energy, ambient gas and it’s pressure, and energy distribution of laser beam strongly influence spatial and depth resolution, and meanwhile a approach to improving resolution considering analytical sensitivity is provided. Compared with traditional surface analytical methods, the advantage of LIBS is very large scanning area, high analytical speed, and that conducting materials or non-conducting materials both can be analyzed. It becomes a powerful complement of traditional surface analytical tool.

Key words：Laser induced-breakdown spectroscopy;Materials science;Surface analysis;Application progress

收稿日期: 2011-12-12 修订日期: 2012-03-20

中图分类号:

TB302.1

通讯作者: 贾云海 E-mail: jyh@analysis.org.cn

引用本文:

张勇^1,2，贾云海^1,2*，陈吉文^1,2，刘英³，沈学静^1,2，赵雷^1,2，王书明³，于洪⁴，韩鹏程^1,2，屈华阳^1,2，刘少尊¹ . 激光诱导击穿光谱在材料表面分析领域中的应用进展[J]. 光谱学与光谱分析, 2012, 32(06): 1441-1446.
ZHANG Yong^1,2, JIA Yun-hai^1,2*, CHEN Ji-wen^1,2, LIU Ying³, SHEN Xue-jing^1,2, ZHAO Lei^1,2, WANG Shu-ming³, YU Hong⁴, HAN Peng-cheng^1,2, QU Hua-yang^1,2, LIU Shao-zun¹. Application Progress of Laser-Induced Breakdown Spectroscopy for Surface Analysis in Materials Science Field. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2012, 32(06): 1441-1446.

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[1] Winefordner J D，Gornushkin I B，Correll T，et al. Journal of Analytical Atomic Spectrometry，2004, 19: 1061.
[2] Aragon C，Aguilera J A. Spectrochimica Acta Part B: 2008, 63: 893.
[3] Miziolek A W, Palleschi V, Schechter I. Laser-Induced Breakdown Spectroscopy. Cambridge University Press, 2006. 225.
[4] Bette H，Noll R. J. Phys. D: Appl. Phys., 2004, 37: 1281.
[5] Kuss H M，Mittelstaedt H，Mueller G. Journal of Analytical Atomic Spectrometry，2005, 20: 730.
[6] Bigne F B. Spectrochimica Acta Part B, 2008, 63: 1122.
[7] Bigne F B. Applied Spectroscopy, 2007, 61(3): 333.
[8] Cravetchi I V, Taschuk M T, Tsui Y Y, et al. Spectrochimica Acta Part B，2004, 59: 1439.
[9] Cravetchi I V, Taschuk M T, Tsui Y Y, et al. Anal. Bioanal. Chem., 2006, 385: 287.
[10] Cabalin L M，Mateo M P，Laserna J J. Spectrochimica Acta Part B，2004, 59: 567.
[11] Mateo M P，Cabalin L M，Baena J M, et al. Spectrochimica Acta Part B, 2002, 57: 601.
[12] Cabalin L M，Laserna J J. Spectrochimica Acta Part B, 2004, 59: 147.
[13] Menut D，Fichet P，Lacour J L，et al. Applied Optics, 2003, 42(30): 6063.
[14] Wiggenhauser H, Schaurich D, Wilsch G. NDT&E Internationa，1998, 31(4): 307.
[15] Cabalin L M，Laserna J J. Analytical Chemistry，2001, 73: 1120.
[16] Mateo M P，Palanco S，Vadillo J M，et al. Applied Spectroscopy, 2000, 54(10): 1429.
[17] Hiroyuki K，Michihiro A，Hideaki Y，et al. Metallurgical Analysis(冶金分析)，2009, 29(1): 13.
[18] Muller G，Stahnke F，Bleiner D. Talanta, 2006, 70: 991.
[19] Mateo M P，Cabalin L M，Laserna J J. Applied Spectroscopy, 2003, 61(3): 343.
[20] Mateo M P，Cabalin L M，Laserna J J. Applied Spectroscopy, 2003, 57(12): 1461.
[21] Romero D，Laserna J J. Journal of Analytical Atomic Spectrometry, 1998, 13: 557.
[22] Romero D，Laserna J J. Journal of Analytical Atomic Spectrometry，1999, 14: 199.
[23] Kim T, Lin C T. J. Phys. Chem. B, 1998, 102: 4284.
[24] Vadillo J M，Palanco S，Romero M D，et al. Fresenius J. Anal. Chem., 1996, 355: 909.
[25] Romero D，Laserna J J. Spectrochimica Acta Part B, 2000, 55: 1241.
[26] Lucena P，Laserna J J. Spectrochimica Acta Part B, 2001, 56: 177.
[27] Loebe K, Arnold U, Lucht H, et al. Applied Optics, 2003, 42(30): 6166.
[28] Chen J W，Zhao L，Yao N J，et al. 8th International Workshop on Progress in Analytical Chemistry & Materials Characterisation in the Steel and Metal Industries. Luxembourg，May 17, 2011. 190.
[29] Vadillo J M，Romero J M，Rodr C G，et al. Surface and Interface Analysis, 1998, 26: 995.
[30] Margetic V，Bolshov M，Stockhaus A，et al. Journal of Analytical Atomic Spectrometry, 2001, 16: 616.
[31] Vadillo J M，Laserna J J. Journal of Analytical Atomic Spectrometry, 1997, 12: 859.
[32] Vadillo J M，Garcia C C，Palanco S，et al. Journal of Analytical Atomic Spectrometry, 1998, 13: 793.
[33] Garcia C C，Corral M，Vadillo J M，et al. Applied Spectroscopy, 2000, 54(7): 1027.
[34] Mateo M P, Cabalin L M, Laserna J. Applied Optics, 2003, 42(30): 6057.
[35] Mateo M P, Vadillo J M，Laserna J J. Journal of Analytical Atomic Spectrometry: 2001, 16: 1317.
[36] St-Onge L. Journal of Analytical Atomic Spectrometry，2002, 17: 1083.
[37] St-Onge L, Sabsabi M. Spectrochimica Acta Part B, 2000, 55: 299.
[38] Tereszchuk K A, Vadillo J M, Laserna J J，et al. Spectrochimica Acta Part B, 2009, 64: 378.
[39] Anderson D R, Mcleod C W，Englisha T, et al. Applied Spectroscopy, 1995, 49(6): 691.
[40] Milan M，Lucena P，Cabalin L M，et al. Applied Spectroscopy, 1998, 52(3): 444.
[41] Balzer H，Hlters S，Sturm V，et al. Analytical and Bioanalysis Chemistry，2006, 385: 234.
[42] Ruiz J，González A，Cabalin L M，et al. 8th International Workshop on Progress in Analytical Chemistry & Materials Characterisation in the steel and Metal Industries. Luxembourg，May 17, 2011. 444.