Near Infrared Spectroscopy System Structure with MOEMS Scanning Mirror Array
LUO Biao, WEN Zhi-yu*，WEN Zhong-quan，CHEN Li，QIAN Rong-rong
National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Micro-system Research Center of Chongqing University, Chongqing 400044, China
Abstract：A method which uses MOEMS mirror array optical structure to reduce the high cost of infrared spectrometer is given in the present paper. This method resolved the problem that MOEMS mirror array can not be used in simple infrared spectrometer because the problem of imaging irregularity in infrared spectroscopy and a new structure for spectral imaging was designed. According to the requirements of imaging spot, this method used optical design software ZEMAX and standard-specific aberrations of the optimization algorithm, designed and optimized the optical structure. It works from 900 to 1 400 nm. The results of design analysis showed that with the light source slit width of 50 μm, the spectrophotometric system is superior to the theoretical resolution of 6 nm, and the size of the available spot is 0.042 mm×0.08 mm. Verification examples show that the design meets the requirements of the imaging regularity, and can be used for MOEMS mirror reflectance scan. And it was also verified that the use of a new MOEMS mirror array spectrometer model is feasible. Finally, analyze the relationship between the location of the detector and the maximum deflection angle of micro-mirror was analyzed.
Key words：Near infrared spectroscopy;Flat field concave grating;Astigmatism;ZEMAX;Micro-mirror
[1] LU Wan-zhen(陆婉珍). Near Infrared Spectroscopy Analysis of Modern(现代近红外光谱分析技术·第2版). Beijing: China Petrochemical Press(北京：中国石化出版社)，2007. 306. [2] YAN Yan-lu(严衍禄). Analytical Basic Application of Infrared Spectroscopy(近红外光谱分析基础与应用). Beijing: China Light Industry Press(北京：中国轻工业出版社), 2005. [3] SONG Qiong, MA Guo-xin(宋 琼, 马国欣). Infrared(红外), 2006, 27(11): 31. [4] JI Hai-yan(吉海彦). Modern Scientific Instruments(现代科学仪器), 2001, (6): 25. [5] Thomas Otto, Ray Saupe, Reinhard Bruch, et al. IEEE, 2002, 49: 31.
