ZHANG Zhi-hai1,2, MUO Xiang-xia1,2, GUO Yuan-jun1,2, WANG Wei1,2
1. Key Laboratory for Opto-Eletronic Technology and System, Ministry of Education, Chongqing University, Chongqing 400044，China 2. State Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044，China
Abstract：A new type micro Hadamard transform (HT) near-infrared (NIR) spectrometer is proposed in the present paper. It has a MOEMS (Micro-Opto-Electro-Mechanical Systems) blazed grating HT mask. It has merits of compactness, agility of dynamic mask generation and high scan speed. The structure and theory of this spectrometer are analyzed. The 63-order Hadamard-S matrix and mask are designed. The mask is dynamically generated by program of MOEMS blazed gratings. The spectrum is in agreement with that measured by Shimadzu spectrometer in experiments. It has a wavelength range between 900 and 1 700 nm, spectral resolution of 19 nm, single scan time of 2.4 s, SNR of 44.67∶1, optical path of 70 mm×130 mm, and weight under 1 kg. It can meet the requirement of real time detection and portable application.
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