XPS and Raman Studies of Diamond-Like Carbon Films Prepared by Various Deposition Techniques
YANG Fa-zhan1, WANG Shi-qing1, 2, SHEN Li-ru1*, CHEN Qing-chuan1
1. Southwestern Institute of Physics, Chengdu 610041, China 2. The Engineering and Technical College, Chengdu University of Technology, Leshan 614000, China
Abstract：Diamond-like carbon(DLC) films were deposited on a silicon chip substrate by a metal pulsed magnetic filtered cathodic vacuum arc deposition technique，a direct current magnetron sputtering technique and a pulsed glow discharge plasma enhanced chemical vapor deposition technique. And the characteristics of DLC films were investigated using laser Raman spectroscopy and X-ray photoelectron spectroscopy. The spectra of diamond like carbon were collected using Raman spectrometers with 325 nm flters. It was found that DLC films prepared by various deposition technique have different G-peak，D-peak，T-peak，the full width at half maximum(FWHM)of G-peak，D-peak and T-peak, the intensity ratio I(D)/I(G) and I(T)/I(G) and the sp3 content. Among them，the films grown by metal pulsed magnetic filtered cathodic vacuum arc deposition technique have the largest G-peak wave number and the intensity ratio I(T)/I(G)，the minimum of the intensity ratio I(D)/I(G)，G-FWHM and the maximum sp3 content;those grown by the direct current magnetron sputtering technique have the 2nd largest G-peak wave number，the intensity ratio I(D)/I(G) and I(T)/I(G) and sp3 content, however, they have the largest G-FWHM, while those grown by the pulsed glow discharge plasma enhanced chemical vapor deposition technique have the minimum G-peak wave number and the intensity ratio I(T)/I(G) and sp3 content, and the maximum intensity ratio I(D)/I(G).
杨发展1，王世庆1, 2，沈丽如1*，陈庆川1. 不同方法制备的类金刚石薄膜的XPS和Raman光谱的研究[J]. 光谱学与光谱分析, 2011, 31(07): 1800-1803.
YANG Fa-zhan1, WANG Shi-qing1, 2, SHEN Li-ru1*, CHEN Qing-chuan1 . XPS and Raman Studies of Diamond-Like Carbon Films Prepared by Various Deposition Techniques. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2011, 31(07): 1800-1803.
[1] Aisenberg S, Chabot R J. Appl. Phys.，1971，42(7)：2953. [2] Carapeto A P, Serro A P, Nunes B M F，et al. Surface and Coatings Technology, 2010，204: 3451. [3] Huang Tsuihsien, Guo Jiauei, Kao Chiatze. Surface and Coatings Technology, 2010, 205: 1917. [4] Nutthanun Moolsradoo，Shuichi Watanabe. Diamond and Related Materials，2010, 19: 525. [5] Akihito Suzuki, Yusuke Aiyama, Maiko Tokoro, et al. Wear, 2010，269: 118. [6] Marciano F R, Lima-Oliveira D A, Da-Silva N S, et al. Surface and Coatings Technology, 2010, 204: 2986. [7] Ferrari A C. Surf Coatings Techn, 2004, 180-181: 190. [8] Hironari Okada, Yoshihiko Uematsu, Keiro Tokaji. Procedia Engineering, 2010, 2: 283. [9] Smietana M，Bock W J，Szmidt J. Diamond and Related Materials, 2010, 19: 1461. [10] Puchi-Cabrera E S, Staia M H, Ochoa-Pérez E A，et al. Materials Science and Engineering，2010，527: 498. [11] Wang Guigen, Zhang Huayu, Zhou Hongfei, et al. Applied Surface Science, 2010, 256: 3024. [12] Gerke L, Stella J, Schauer J C, et al. Surface and Coatings Technology, 2010, 204: 3418. [13] Jelínek M，Smetana K，Kocourek T. Materials Science and Engineering, 2010, 169: 89. [14] Silva S R P，Stolojan V. Thin Solid Films，2005，488: 283. [15] Jackson Stuart T, Nuzzo Ralph G. Appl. Sur. Sci.，1995，90: 195. [16] Ferrari A C，Robertson J. Phys. Rev. B，2001, 64: 075414. [17] Ferrari A C Robertson. J. Phys. Rev. B，2001，63: R121405.
