Abstract:Slot microplasma was generated in argon and air mixture by using dielectric barrier discharge device with two parallel water electrodes. The molecular vibrational temperature, molecular rotational temperature and average electron energy of the slot plasma were studied by optical emission spectrum. The molecular vibrational temperature was calculated using the second positive system of nitrogen molecules (C3Πu→B3Πg). The molecular rotational temperature was calculated using the first negative system of nitrogen molecular ions (B2Σ+u→X2Σ+g). The relative intensities of the first negative system of nitrogen molecular ions (391.4 nm) and nitrogen molecules in the excitation level (337.1 nm) emission spectrum line were measured for studying the variations of electron energy. It was found that the molecular vibrational temperature, molecular rotational temperature and average electron energy decrease with gas pressure increasing.
Key words:Slot microdischarge plasma;Molecular vibrational temperature;Molecular rotational temperature;Average electron energy
[1] Schoenbach K H, Shi W, Ciocca M, et al. Plasma Sources Sci. Technol., 1997, 6: 468. [2] Dhali S K, Sardja I. J. Appl. Phys., 1991, 69: 6319. [3] Boeuf J P. J. Phys. D: Appl. Phys., 2003, 36: R53. [4] Heise M, Neff W, Franken O, et al. Plasmas and Polymers, 2004, 9: 23. [5] Karanassios V. Spectrochim. Acta Part B, 2004, 59: 909. [6] Kim J, Terashima K. Appl. Phys. Lett., 2005, 86: 191504. [7] Koo I G, Cho J H, Choi M Y, et al. Appl. Phys. Lett., 2007, 91: 041502. [8] Kim Jaeho, Katsurai Makoto, Kim Dongmin, et al. Appl. Phys. Lett., 2008, 93: 191505. [9] Masoud N, Martus K, Figus M, et al. Contrib. Plasma Phys., 2005, 45(1): 30. [10] Yalin A P, Yu Z Q, Stan O, et al. Appl. Phys. Lett., 2003, 83: 2766. [11] Herzberg G(G·赫兹堡). Molecular Spectra and Molecular Structure Ⅰ. Spectra of Diatomic Molecules(分子光谱与分子结构, 第1卷-双原子分子光谱). Beijing: Science Press(北京: 科学出版社), 1983. 155. [12] Kozlov K V, Brandenburg R, Michel P, et al. J. Phys. D: Appl. Phys., 2001, 34: 3164.