Abstract：The reflective infrared transmittance spectra at oblique incidence of SiO2 films deposited on c-Si wafer have been measured.The thickness of the films was micrometer quantity.The spectra showed many differences from the common transmittance (or absorption) spectra in the range of 900-1 250 cm-1.The reflectivity peak at 1 100 cm-1 was found and its position was essentially fixed.With the thickness increased， the drop of peak at 1 100 cm-1 and hollow at 1 200 cm-1 became gradually slow.As the thickness increased to be over 2 micrometers, the shape of the spectra in 1 075-1 250 cm-1 did not change obviously.The analysis showed that the measured spectrum was composed of reflectivity spectrum and absorption spectrum of the SiO2 film, which occurred at Air/SiO2 interface and SiO2 layer respectively.When the thickness was over one micrometer and the film had considerable absorption, the contribution from reflectivity spectrum became very obvious.So the absorption is not the only factor in the analysis of these spectra.
余云鹏，林舜辉，林璇英，林揆训. 硅基片上微米厚度SiO2膜的斜入射红外反射透过谱分析[J]. 光谱学与光谱分析, 2005, 25(08): 1234-1236.
YU Yun-peng, LIN Shun-hui, LIN Xuan-ying, LIN Kui-xun. Analysis of Reflective IR Transmittance Spectra at Oblique Incidence of Micrometer SiO2 Films on c-Si Substrate . SPECTROSCOPY AND SPECTRAL ANALYSIS, 2005, 25(08): 1234-1236.
[1] Lai Q, Lanker M, Hunziker W, et al.Electron.Lett., 1998, 34(3): 266. [2] Akahori Y, Mino S, Ohyama T, et al.OFC'96.Optical Fiber Communication.Vol.2, 1996 Technical Digest Series.Conference Edition (IEEE Cat.No.96CH35901), 1996，64. [3] Okamato K, Takiguchi K, Ohmori Y.Electron.Lett., 1995, 31(9): 723. [4] Hoffman M, Kopka Peter, Voges Edgar.IEEE.Photo.Tech.Lett., 1997, 9(9): 1238. [5] Bazylenko M V, Gross M, Allen P M, et al.IEEE.Photo.Tech.Lett., 1995,7(7): 774. [6] YU Yun-peng，XU Yan-ping，WU Yong-jun，et al(余云鹏，徐严平，吴永俊，等).Vaccum(真空), 2001, 4: 30. [7] Almeida R M, Pantano C G.J.Appl.Phys., 1990, 68(8): 4225. [8] Kamitsos E I, Patsis A P, Kordas G.Phys.Rev.B, 1993, 48(17): 12499. [9] Almeida R M.Phys.Rev.B, 1992, 45(1): 161. [10] Kim Bog-Gi, Kang Seung-You, Kim Jong-Jean.J.Phys.D:Appl.Phys., 1997, 30: 1720. [11] Martinet C, Devine R A B.J.Appl.Phys., 1995, 77(9): 4343. [12] QIAN Guo-dong, CHEN Miao, ZHANG Peng-yue, et al(钱国栋，陈 苗，张朋越，等).Spectroscopy and Spectral Analysis(光谱学与光谱分析)，2005，25(2)： 181.
