Design and Simulation of the NIR Micro-Spectrometer Optical System
WANG Ling-fang, WEN Zhi-yu, XIANG Xian-yi
Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, Microsystem Research Center, Chongqing University, Chongqing 400044，China
Abstract：Based on the working principle of analyzing spectrometer and the theory of optical design, to make the system miniature, and with a certain spectral range and resolution requirements as specific design objectives, a cross-C-T micro-structure based on a plane diffraction grating spectrophotometer of the near-infrared spectrometer was put forward; ZEMAX was used for design and optimizing and simulating analysis of micro-near-infrared spectrometer in the optical system. The result showed that the micro-optical system’s spectral range was 900-1 700 nm, resolution was ＜10 nm, spectrum broadening was 12.74 mm, F number was 8.128 388, and the system volume was 51.26 mm×41.81 mm×22 mm, and these all satisfy the requirements. It solved the micromation of the optical system of the spectrometer, and therefore, contributed to the micromation of the spectrometer itself.
Key words：Micro-spectrometer;Plate diffraction grating;Cross Czerny-Turner;Spectrophotometer system;Imaging system
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