芯片级硅基光谱仪研究进展

doi:10.3964/j.issn.1000-0593(2020)02-0333-10

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摘要：光谱仪作为光谱分析不可或缺的工具，在生物传感、食药检测、医疗、环境监测等领域有着广泛的用途。传统的光谱仪体积大、功耗高、价格昂贵和难以二次开发，应用范围受到了极大地限制。随着微型加工工艺的发展，微型化的光谱仪逐渐出现。相较于传统的大型光谱仪，微型光谱仪不仅成本低、体积小、功耗低，而且便于二次开发，扩展了光谱仪的应用范围。但是，微型光谱仪通常是基于分立的光学器件，通过将光学器件的小型化而实现的，集成度和灵活性不高。随着对便携性的要求越来越高，光谱仪的进一步小型化和集成化已成趋势，出现了芯片级的光谱仪。芯片级光谱仪具有明显的尺寸、重量和功耗的优势，将对光谱仪在无人设备、智能平台等新兴领域中的应用产生重要影响。在芯片级光谱仪的实现过程中，硅基光子技术因其成熟的加工工艺和良好的集成性能，为光谱仪的芯片化提供了一种集成化、低成本的解决方案，国内外研究人员针对芯片级硅基光谱仪展开了大量的研究，取得了丰富的成果。文章分析了硅基片上光谱仪的工作原理，将目前的芯片级硅基光谱仪分成了色散型和傅里叶变换型两大类进行介绍，分析了这两类光谱仪的主要特点和典型实现方式。文中给出了刻蚀衍射光栅、波导阵列光栅、多模波导等色散型硅基片上光谱仪和空间外差、驻波式、热调、数字以及基于微机电系统的傅里叶变换型硅基片上光谱仪的最新研究进展，分析了各种光谱仪的性能特点和适用范围。在此基础上，展示了本组的最新研究成果，通过创造性地将基于马赫曾德尔干涉仪的空间外差傅里叶变换型光谱仪结构和波导阵列光栅的色散型光谱仪结构相结合，可同时实现较大的光谱范围和较高的光谱分辨率，为硅基片上光谱仪的应用打下了较好的基础。最后，论述了硅基片上光谱仪的发展趋势与应用前景，为芯片级硅基光谱仪的研究提供了参考。

关键词：硅基；片上光谱仪；色散；傅里叶变换

Abstract：Optical spectrometers have become an indispensable tool in various fields that involve optical spectrum analysis. Its application ranges in many areas, such as biochemical sensing, food and drug testing, medical treatment and environmental monitoring. The application of traditional spectrometers is greatly limited due to the size, high power consumption and price, difficult secondary development. With the development of micro processing, miniaturized spectrometers have been developed. Compared to the traditional spectrometers, miniaturized spectrometers have the advantages of low cost, small volume, low power consumption and easy secondary development, which expands the application. However, miniaturized spectrometer, which is usually based on discrete optical components, doesn’t have high integration and flexibility. As the requirement of portability becomes higher and higher, further miniaturization and integration has become a trend of spectrometer. On-chip spectrometers, with apparent Size, Weight, and Power (SWaP) advantages, have unprecedented impact on applications ranging from unmanned devices to intelligent platform. Among the methods to realize on-chip spectrometers, silicon photonics offers an approach to realize an integrated and cheap spectroscopic system because of its mature processing and integration. During the last few years, on-chip spectrometers have become an enormously active area, resulting in significant progress. In this review, it summarizes the principle of the silicon based on-chip spectrometer, and introduces the developments of the dispersive spectrometers including spectrometers based on the etch diffraction grating, arrayed waveguide grating and multimode waveguides, and Fourier transform spectrometers including spatial heterodyne, stationary wave, thermos-optic, digital and MEMS Fourier transform spectrometers. We analyze the characteristics and applications of these spectrometers. Our research has also been demonstrated. By combining the mach-zehnder interferometer spectrometer and the arrayed waveguide grating spectrometer, the large spectral range and high resolution have been simultaneously achieved. At the end, we also discuss the future challenges and prospects in this field, which can give some reference for the research of on-chip spectrometers.

Key words：Silicon based; On-chip spectrometer; Dispersion; Fourier transform

收稿日期: 2019-01-22 修订日期: 2019-04-25

中图分类号:

O433.1

基金资助: 装备预研项目(6141B08130302)资助

通讯作者: 王伟平 E-mail: wangweiping2016@163.com

作者简介: 王伟平，1988年生，中国电子科技集团公司信息科学研究院工程师 e-mail: wangweiping2016@163.com

引用本文:

王伟平，金里. 芯片级硅基光谱仪研究进展[J]. 光谱学与光谱分析, 2020, 40(02): 333-342.
WANG Wei-ping, JIN Li. Research Progress of On-Chip Spectrometer Based on the Silicon Photonics Platform. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(02): 333-342.

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